Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>

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CVD System 1200 ℃
  • CVD System 1200 ℃
  • CVD System 1200 ℃
  • CVD System 1200 ℃
  • CVD System 1200 ℃
  • CVD System 1200 ℃

    Model:KJ-TCVD1200

    Description:

    In the fields of semiconductor manufacturing, automotive industry, general machinery, digital products, light-emitting diodes, etc., they provide these products with better wear resistance, corrosion resistance and other properties.

    In the fields of semiconductor manufacturing, automotive industry, general machinery, digital products, light-emitting diodes, etc., they provide these products with better wear resistance, corrosion resistance and other properties.
     
     

    Technical Parameters
     
    Tube Furnace Part
    Product model KJ-TCVD1200
    Maximum temperature 1200℃
    Working temperature ≦1100℃
    Heating zone 200mm Customizable
    Heating element Molybdenum alloy resistance wire
    Heating rate 0-20ºC/min, 10C/min recommended
    Tube size Diameter 50*600mm Customizable
    Tube material High-purity quartz tube
    Tube plugging Metal screen on the left, detachable
    Temperature control system 7-inch touch screen control
    Temperature control protection With over-temperature and broken couple protection function
    Temperature measuring element N-type thermocouple
    Temperature control accuracy ±1℃
    Furnace material Polycrystalline fiber material
    Flange Stainless steel sealed water-cooled flange, quartz lens on the right flange end
    Sealing system O-ring extrusion seal is used between the furnace tube and the flange;
    Dynamic seal is used between the rotating motor and the flange
    Furnace structure Outer shell is made of stainless steel, double-layer liner structure, and the furnace door is opened manually
    Furnace shell temperature ≤55℃
     
    Rotation System
    Speed ​​​​ 200r/min
    Connection method Coupling connection with shaft dynamic seal transmission
     
    Vacuum System
    Name DRV10 rotary vane pump 2L/S
    Main parameters Ultimate vacuum ≤10Pa
    Vacuum gauge Resistance gauge + film gauge
    Pressure control Working pressure 0.04-0.06Mpa
    Filter Vacuum pump equipped with special filter device
    Pressure gauge Mechanical pressure gauge
     
    Gas System
    Air path One nitrogen
    Flow control Touch screen display
    Flow range 500SCCM
    Control accuracy ±1.5%F.S
    Inlet interface 1 manual valve + 1 solenoid valve
    Exhaust interface 1 manual valve

    Inquiry

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    Relate Customer Case

    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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